Microstructure and Mechanical Properties of Mo-Si-N Coatings Deposited by a Hybrid Coating System
하이브리드 코팅시스템에 의해 제조된 Mo-Si-N 박막의 미세구조 및 기계적 특성연구
허수정;윤지환;강명창;김광호;
Heo, Su-Jeong;Yun, Ji-Hwan;Kang, Myung-Chang;Kim, Kwang-Ho;
부산대학교 재료공학부;
Division of Materials Science and Engineering, Pusan National University;
In this work, comparative studies on microstructure and mechanical properties between $Mo_2N$ and Mo-Si-N coatings were conducted. Ternary Mo-Si-N coatings were deposited on AISI D2 steel substrates by a hybrid method, where AIP technique was combined with a magnetron sputtering technique. Instrumental analyses of XRD, HRTEM, and XPS revealed that the Mo-Si-N coatings must be a composite consisting of fine $Mo_2N$ crystallites and amorphous $Si_3N_4$. The hardness value of Mo-Si-N coatings significantly increased from 22 GPa of $Mo_2N$ coatings to about 37 GPa with Si content of 10 at.% due to the refinement of $Mo_2N$ crystallites and the composite microstructure characteristics. The average friction coefficient of the Mo-Si-N coatings gradually decreased from 0.65 to 0.4 with increasing Si content up to 15 at.%. The effects of Si content on microstructure and mechanical properties of Mo-N coatings were systematically investigated.
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