Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (39권1호 9-12)

Influence of Ag Thickness on Electrical and Optical Properties of AZO/Ag/AZO Multi-layer Thin Films by RF Magnetron Sputtering

RF magnetron sputter에 의해 제조된 AZO/Ag/AZO 다층박막의 Ag 두께가 전기적 광학적 특성에 미치는 영향

안진형;강태원;김동원;김상호;
An Jin-Hyung;Kang Tea-Won;Kim Dong-Won;Kim Sang-Ho;

한국기술교육대학교 신소재공학과;국민대학교 기계.자동차공학부;경기대학교 신소재공학과;
Materials Science and Engineering, Korea University of Technology and Education;School of Mechanical and Automotive Engineering, Kookmin University;Department of Materials Science and Engineering, Kyonggi University;

Abstract

Al-doped ZnO(AZO)/Ag/AZO multi-layer films deposited on PET substrate by RF magnetron sputtering have a much better electrical properties than Al-doped ZnO single-layer films. The multi-layer structure consisted of three layers, AZO/Ag/AZO, the optimum thickness of Ag layers was determined to be $112{AA}$ for high optical transmittance and good electrical conductivity. With about $1800{AA}$ thick AZO films, the multi-layer showed a high optical transmittance in the visible range of the spectrum. The electrical and optical properties of AZO/Ag/AZO were changed mainly by thickness of Ag layers. A high quality transparent electrode, having a resistance as low as $6;W/{square}$ and a high optical transmittance of 87% at 550 nm, was obtained by controlling Ag deposition parameters.

Keywords

AZO;Ag;PET;RF magnetron sputtering;Optical transmission;Sheet resistance;