한국표면공학회지 (39권1호 1-8)
Study on the Effect of Sputtering Process on the Adhesion Strength of CrN Films Synthesized by a Duplex Surface Treatment Process
복합표면처리된 CrN박막의 밀착력에 미치는 스퍼터링 효과에 관한 연구
김명근;김은영;김정택;이상율;
Kim M.K.;Kim E.Y.;Kim J.T.;Lee S.Y.;
플라즈마 응용 표면기술연구센터, 한국항공대학교 재료공학과;
Center for Advanced Plasma Surface Technology Department of Materials Engineering, HanKuk Aviation University;
In this study, effect of sputtering after plasma nitriding and before PVD coating on the microstucture, microhardness, surface roughness and the adhesion strength of CrN thin films were investigated. Experimental results showed that this sputtering process not only removed surface compound layer which formed during a plasma nitriding process but also induced an alteration of the surface of plasma nitrided substrate in terms of microhardness distribution and surface roughness, which in turn affected the adhesion strength of PVD coatings. After sputtering, microhardness distribution showed general decrease and the surface roughness became increased slightly. The critical shear stress measured from the scratch test on the CrN coatings showed an approximately twice increase in the binding strength through the sputtering prior to the coating and this could be attributed to a complete removal of compound layer from the plasma nitrided surface and to an increase in the surface roughness after sputtering.
Duplex surface treatment;Plasma nitriding;PVD coating;Adhesion strength;CrN thin film;