Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (38권5호 183-187)

Structure and Mechanical Characteristics of ZrCrAIN Nanocomposite Thin Films by CFUBMS

CFUBMS을 이용한 ZrCrAIN 나노복합 박막의 구조와 기계적 특성

김연준;이호영;신경식;정우성;한전건;
Kim Youn J.;Lee Ho Y.;Shin Kyung S.;Jung Woo S.;Han Jeon G.;

성균관대학교 신소재공학과, 플라즈마 응용 표면기술 연구센터;
Department of Advanced Materials Engineering, Sungkyunkwan University, Korea Center for Advanced Plasma Surface Technology;

Abstract

The quaternary ZrCrAIN nanocomposite thin films are synthesized by Closed-Field Unbalanced Magnetron Sputtering (CFUBMS). Microstructure and mechanical properties of ZrCrAIN nanocomposite thin films are studied. Grain refinement of ZrCrAIN nanocomposite thin film is occurred by controlling $N_{2}$ partial pressure. Maximum hardness value according to the various $N_{2}$ partial pressures is obtained at 45 GPa. It is also conformed that critical value of the grain size (d) needs to achieve the maximum hardness.

Keywords

ZrCrAIN;Nanocomposite;CFUBMS;