Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403

공학

한국표면공학회지 (38권3호 100-105)

Microstructure and Mechanical Properties of Superhard Cr-Si-C-N Coatings Prepared by a Hybrid Coating System

하이브리드 코팅 시스템으로 제조된 초고경도 Cr-Si-C-N 나노복합 코팅막의 미세구조 및 기계적 특성

장철식;허수정;송풍근;김광호;
Jang Chul Sik;Heo Su Jeong;Song Pung Keun;Kim Kwang Ho;

부산대학교 재료공학부;
School of Materials Science and Engineering, Pusan National University;

Abstract

Cr-Si-C-N coatings were deposited on steel substrate (SKD 11) by a hybrid system of arc ion plating (AIP) and sputtering techniques. From XRD, XPS, and HRTEM analyses, it was found that Cr-Si-C-N had a fine composite microstructure comprising nano-sized crystallites of Cr(C, N) well distributed in the amorphous phase of $Si_3N_4/SiC$ mixture. Microhardness of Cr(C, N) coatings and Cr-Si-N coatings were reported about $~22 GPa$ and $~35 GPa$, respectively. As the Si was incorporated into Cr(C, N) coatings, The Cr-Si-C-N coatings having a Si content of $9.2 at.\%$ showed the maximum hardness value. As increased beyond Si content of $9.2 at.\%$, the interaction between nanocrystallites and amorphous phase was gone, the hardness was reduced as dependent on amorphous phase of $Si_3N_4/SiC$. In addition, the average coefficient of Cr-Si-C-N coatings largely decreased compared with Cr(C, N) coatings.

Keywords

Microstructure;Mechanical property;Cr-Si-C-N;Hybri coating system;