Korean Institute of Surface Engineering

pISSN : 1225-8024 | eISSN : 3399-8403


공학

한국표면공학회지 (37권5호 243-248)

A Study on the Pd-Ni Alloy Hydrogen Membrane Using the Sputter Deposition

스퍼터 증착 방식으로 제조된 Pd-Ni 합금 수소 분리막 연구

김동원;박정원;김상호;박종수;
Kim Dong-Won;Park Jeong-Won;Kim Sang-Ho;Park Jong-Su;

경기대학교 신소재공학과;한국기술교육대학교 신소재공학과;한국에너지기술연구원;

Abstract

A palladium-nikel(Pd-Ni) alloy composite membrane has been fabricated on microporous nickel support formed with nickel powder. Plasma surface treatment process is introduced as pre-treatment process instead of HCI activation. Pd coating layer was prepared by dc magnetron sputtering deposition after $H_2$ plasma surface treatment. Palladium-nickel alloy composite layer had a fairly uniform and dense surface morphology. The membrane was characterized by permeation experiments with hydrogen and nitrogen gases at temperature of 773 K and pressure of 2.2psi. The hydrogen permeance was 6 ml/minㆍ$ extrm{cm}^2$ㆍatm and the selectivity was 120 for hydrogen/nitrogen($H_2$/$N_2$) mixing gases at 773 K.

Keywords

Porous nikel metal support;Pd-Ni alloy hydrogen membrane;Plasma surface treatment;Electro plating;Sputtering deposition;